The Bosch Rexroth Indramat VTS 0606 PVAR S21 vacuum technology valve is a high-precision solution in the VT-UK2 Universal Cards series, engineered for demanding industrial automation environments. This universal card integrates a robust Pneumatic actuation mechanism with a compact Dimensions: 60mm x 60mm form factor, allowing efficient rack mounting within standard 100 mm × 160 mm chassis. Constructed from stainless steel with PVAR polymer sealing, the VTS 0606 PVAR S21 sustains operational integrity under ultra-low pressure conditions, supporting a Pressure Range: up to 10^-9 mbar and achieving a Leak Rate: < 1 x 10^-9 mbar l/s. An ISO-KF flange connection simplifies system interfacing, while the bidirectional design ensures flexible flow control in both evacuation and backfill operations.
The technical specifications of the VTS 0606 PVAR S21 highlight its suitability for precise vacuum regulation. It features an End Connection: ISO-KF Flange and a Surface Finish: Ra < 0.8 µm that minimizes outgassing and particulate generation. The card module includes both ceramic capacitors and electrolytic capacitors for high-frequency filtering and voltage stabilization, alongside standard axial resistors (1/4 W) for accurate signal conditioning. Visual status is provided by red signal LEDs and incandescent indicator bulbs, while a dedicated toggle switch and fuse protect internal circuitry from overcurrent events. The assembly weighs Approx. 2.1 kg and operates reliably over a Temperature Range: –20°C to +120°C, with a total Type: VTS Vacuum Technology Valve package optimized for cleanroom and harsh factory environments.
Operational performance is further enhanced by integrated SPDT miniature relays that deliver mechanical isolation and switching capabilities for external circuits. The inclusion of operational amplifier ICs supports on-board analog signal amplification, filtering, and processing, ensuring stable feedback in closed-loop control applications. Adjustable trimmers permit field-level calibration of gain, offset, and range, enabling precise tuning to match specific system requirements. The bidirectional flow direction design, combined with rapid pneumatic response, ensures consistent steady-state performance and quick cycle times under variable load conditions. Its robust construction and advanced component layout offer high reliability in continuous-duty vacuum control scenarios.
System integration is seamless within industrial automation platforms, facilitated by the 96-pin DIN connector interface and standardized card profile of the VT-UK2 Universal Cards series. The VTS 0606 PVAR S21 communicates directly with PLC and motion control units, providing diagnostic feedback and remote adjustment through its accessible test points. Target applications include semiconductor fabrication, analytical instrumentation, vacuum coating systems, and research laboratory equipment where compact size, ultra-high vacuum capability, and precise actuation are critical. This valve module delivers consistent performance and simplifies maintenance cycles in automated vacuum networks.
Actuation
Pneumatic
Dimensions
60mm x 60mm
End Connection
ISO-KF Flange
Flow Direction
Bidirectional
Leak Rate
< 1 x 10^-9 mbar l/s
Material
Stainless Steel
Pressure Range
up to 10^-9 mbar
Seal Type
PVAR Polymer Sealing
Surface Finish
Ra < 0.8 µm
Temperature Range
-20°C to +120°C
Type
VTS Vacuum Technology Valve
Weight
Approx. 2.1 kg